The reason Heydrich would qualify is he was arguably the whole reason the "Final Solution" was even implemented. The Nazis were always nasty but the "Final Solution" was initially a fringe position amongst them that even Hitler didn't support, what most Nazis wanted was either Jews becoming a second class of citizens similar to blacks in apartheid South Africa or expelling them all from the new Reich. But Heydrich insisted on the "Final Solution" as the only option and convinced Hitler to his point of view.
Also the actions he took under his SS leadership and as "Protector" of the German occupied Czech puppet state were especially nasty even by SS standards. There's a reason he was targeted for assassination by British intelligence and killed as early as 1942, the Brits realized thus guy was a whole other class of monster and had to be removed ASAP.
"Once I really am in power, my first and foremost task will be the annihilation of the Jews. As soon as I have the power to do so, I will have gallows built in rows—at the Marienplatz in Munich, for example—as many as traffic allows. Then the Jews will be hanged indiscriminately, and they will remain hanging until they stink; they will hang there as long as the principles of hygiene permit. As soon as they have been untied, the next batch will be strung up, and so on down the line, until the last Jew in Munich has been exterminated. Other cities will follow suit, precisely in this fashion, until all Germany has been completely cleansed of Jews."
-Adolf Hitler, 1922, 10 years before a large plurality of the German electorate would vote for his party.
Source: https://en.wikiquote.org/wiki/Adolf_Hitler#1922
This debate has already broken out elsewhere. Intentionalists attribute the origins of the Holocaust to a deliberate plan of Hitler for genocide early on. Functionalists argue that the origins of the Holocaust had more to do with the chaotic and competitive nature of the Nazi bureaucracy in which exterminatory officials and their policies ultimately won out.