The reason Heydrich would qualify is he was arguably the whole reason the "Final Solution" was even implemented. The Nazis were always nasty but the "Final Solution" was initially a fringe position amongst them that even Hitler didn't support, what most Nazis wanted was either Jews becoming a second class of citizens similar to blacks in apartheid South Africa or expelling them all from the new Reich. But Heydrich insisted on the "Final Solution" as the only option and convinced Hitler to his point of view.
Also the actions he took under his SS leadership and as "Protector" of the German occupied Czech puppet state were especially nasty even by SS standards. There's a reason he was targeted for assassination by British intelligence and killed as early as 1942, the Brits realized thus guy was a whole other class of monster and had to be removed ASAP.
Kenneth Branagh has never been more chilling than in the movie
Conspiracy for all the reasons you say. And also thank God Heydrich was killed when he was. No one has ever deserved death more.
That said, the buck ultimately stopped with Hitler, and it was his ideology and actions and approval which enabled all of it to happen in the end. It's easy to imagine someone else taking Heydrich's place; not so easy to imagine someone taking Hitler's.
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