The reason Heydrich would qualify is he was arguably the whole reason the "Final Solution" was even implemented. The Nazis were always nasty but the "Final Solution" was initially a fringe position amongst them that even Hitler didn't support, what most Nazis wanted was either Jews becoming a second class of citizens similar to blacks in apartheid South Africa or expelling them all from the new Reich. But Heydrich insisted on the "Final Solution" as the only option and convinced Hitler to his point of view.
Also the actions he took under his SS leadership and as "Protector" of the German occupied Czech puppet state were especially nasty even by SS standards. There's a reason he was targeted for assassination by British intelligence and killed as early as 1942, the Brits realized thus guy was a whole other class of monster and had to be removed ASAP.
A lot of this is not true actually. There is evidence Hitler wanted to kill all Jews as early as the 1920's (Gemlich letter, Hitler's 1922 interview with Joseph Heil, etc.).
However, Hitler was an extremely pragmatic man. His pragmatism led him to realize early on in his reign that killing Jews would not be feasible, so he first opted towards extreme discrimination and expulsions. However, many countries, including the US, refused to take in Jewish refugees.
However, once it became clear that killing Jews would be feasible, especially under the "fog of war" caused by WWII, Hitler forbade fleeing and sought to kill them all. At this point, he actually became staunchly opposed to Jewish emigration out of the Third Reich because "they could still harm Germany from other countries." He especially opposed the creation of a Jewish state in Palestine because he believed it could serve as a haven for "World Jewry" to carry out its nefarious plans.
The idea that Heydrich was the one who came up with the Final Solution is utterly ridiculous. In fact, Heydrich was one of the least personally anti-Semitic people in Hitler's inner circle. He had many good relationships with Jews and harbored no serious ill feelings towards them. He wasn't even a diehard Nazi and joined the party largely for career advancement. I think you are confusing Heydrich with Himmler. Himmler played a far, far, far bigger role in coming up with the Final Solution and its not even close.
However, it is true that Heydrich is considered to be particularly evil compared to other Nazis, to the point where even Hitler called him "the man with an Iron heart." However, this is largely because he
wasn't a true believer in Nazism like the other top Nazis were. Guys like Hitler truly believed that Jews were evil and needed to be exterminated. In contrast, guys like Heydrich thought that Hitler's ideas about Jews were nonsense. However, he still enthusiastically carried out the Final Solution in the most vile, vicious manner possible because he wanted to rise within the ranks of the Nazi Party and impress the Fuhrer. The fact that Heydrich did what he did despite not being a true believer in Nazism is what makes him particularly evil.